Company Introduction

Shanghai Mega-Energy Technology Co., Ltd is an advanced manufacturer specializing in providing solutions for radio frequency (RF) plasma systems. We are dedicated to the research, development, manufacturing, and sales of core components for plasma process equipment.

Our main products encompass RF power supplies, impedance matchers, remote plasma sources, as well as customized modules such as RF filters, RF voltage and current detectors, E-Chuck high-voltage power supplies, among others. Additionally, we offer one-stop technical solutions for RF systems.

Shanghai Mega-Energy Technology Co., Ltd boasts an outstanding R&D team, equipped with comprehensive design software, simulation tools, and testing platforms. We possess leading-edge technologies in China, including high-frequency power electronics, high-power RF technology, high-speed digital control technology, and plasma control technology.